Plasma Enhance Chemical vapor deposition (PECVD) is a chemical process used to produce high quality, high-performance 2D material.Such as graphene, molybdenum disulphide, thin films, and Nanotube etc. The process is often used in the semiconductor industry to produce thin films.
| Product Name | 1200 degree Three Heating zone Sliding tube furnace PECVDCHY-T1280CS-PECVD | |
| RF Power | Power range | 0-300W (continuously adjustable) |
| Frequency | 13.56MHZ+0.005% | |
| Operating mode | Continuous output | |
| monitor | LCD 128*64 | |
| RF output impedance interface (50Ω) | N-type, female | |
| Power stability | ≤2W | |
| Maximum reflected power | 70W | |
| Harmonic component: ≤dBc | -50 | |
| Distortion (dbc) | -60 | |
| Corresponding time (ms) | 100 | |
| Shutdown time (ms) | 200 | |
| Power protection settings | DC overcurrent protection, power amplifier over temperature protection, reflected power protection | |
| Control mode | 485 communication | |
| 1200 degree Tube Furnace | Model | T1280C |
| Hearth Material | Imported alumina fiber | |
| Heating Element | Fe-Cr-Al-Mo wire (OCr27Al7Mo2) | |
| Maximum Temperature | 1200℃ | |
| Working Temperature | ≤1150℃ | |
| Heating rate | ≤20℃ (Suggest:10℃/min) | |
| Heating zones | Three Heating zone | |
| Heating zone length | 220+220+220mm | |
| Constant temperature zone length | 80+80+80mm | |
| Tube Material | High Purity Quartz Tube | |
| Tube diameter | 80mm(inner diameter:74mm) | |
| Tube Length | 1800mm | |
| Sealing Method | Vacuum flange | |
| Vacuum Air-tightness | 9.8×10-4Pa | |
| Control mode | Intelligent PID auto control | |
| Temperature Accuracy | ±1℃ | |
| Temperature curve | 30 segments programmable | |
| Temperature measure element | K-type thermocouple | |
| Mass Flow Controller | Model | CHY-4Z |
| Flowmeter type | mass flowmeter | |
| Flowmeter core | 304 stainless steel | |
| control valve type | electromagnetism control valve | |
| Tube normalcy | normal close | |
| Flowmeter shell | Black aluminum shell | |
| Gas type | Four way | |
| Interface dimension | 1/4" | |
| Measure Accuracy | ±1.0%F.S | |
| linearity | ±0.5%F.S | |
| repeated accuracy | ±0.2%F.S | |
| pressure range | -0.1-0.15 MPa | |
| A way gas measurement range | 0～100SCCM | |
| B way gas measurement range | 0～200SCCM | |
| C way gas measurement range | 0～200SCCM | |
| D way gas measurement range | 0～500SCCM | |
| Power supply | AC 220V 50Hz | |
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