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  • CHY-EZ6 Laboratory Vacuum Spin Coating Machine for Max 150mm Wafer Coating
  • CHY-EZ6 Laboratory Vacuum Spin Coating Machine for Max 150mm Wafer Coating
  • CHY-EZ6 Laboratory Vacuum Spin Coating Machine for Max 150mm Wafer Coating

CHY-EZ6 Laboratory Vacuum Spin Coating Machine for Max 150mm Wafer Coating

1.Maximum Coating Wafer:6"

2.Working Power:AC110V~220V,50Hz

3.Vacuum Chuck: 3 pieces

4.Made by Henan Chengyi

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Application

EZ6 vacuum spin coater is an economic desktop Vacuum Spin Coater with vacuum chunk which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.

Product parameters
SPECIFICATIONS FOR EZ6 VACUUM SPIN COATER
Spin Coater
Chamber size
1.Chamber diameter: 170mm diameter,HDPE chamber material
2.Maximum wafer sample: 1cm~150mm(6" wafer)
Vacuum Chuck
3 Pieces standard vacuum chuck for use
Rotating Motor100w Brushless Motor
Spin Speed
  1. Speed range:100~12000rpm/s adjustable

  2. Acceleration adjustable range:100~3000rpm/s

  3. Maxi coating time of single step: 3000s

  4. Time Resolution 0.1s

  5. 10 set programmable with 10 steps of each program can restore

Power/Dimension
Voltage
Wide range AC100~230V, adjustable
Diamension
358*256*258mm
Gross weight
20kg
Optional parts
1.You may choose Precision Electronic Single Channel Pipette: 20 - 200uL  for more accurate coating
2.Using plasma cleaner to treat substrate surface before coating can improve film quality



  • Phone:+86 371 5502 7794
  • Fax: +86 371 5502 7786
  • E-mail: chengyi@chysk.com
  • Whatsapp/wechat: +86 156 3927 2359
  • Skype: jennyhao8819
  • Add: #136,10th Avenue,Jingnan 8th Road,Economic Development Zone,Zhengzhou,China