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  • CHY-T1280A-3Z4C Laboratory CVD Tube Furnace with O.D80*1000mm Quartz Tube
  • CHY-T1280A-3Z4C Laboratory CVD Tube Furnace with O.D80*1000mm Quartz Tube
  • CHY-T1280A-3Z4C Laboratory CVD Tube Furnace with O.D80*1000mm Quartz Tube

CHY-T1280A-3Z4C Laboratory CVD Tube Furnace with O.D80*1000mm Quartz Tube

1.O.D80*1000mm high purity quartz tube

2.High quality ceramic fiber chamber

3.PID Programmable controller

4.Three gas way mass flow controller with precision gas flow controller

5.Two stage Vacuum Pump

5.Made by Henan Chengyi


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Application

1.Laboratory heat thermal processing

2.High Vacuum Sintering Heating Annealing Brazing

3.Laboratory Thin Film Preparation,Nano tube growthing

4.Laboratory CVD system,graphene growthing,preparation.

Product parameters
Product Name1200 degree CVD Furnace
Modle No.CHY-T1280A-3Z4C
Heating zonesSingle heating zone
Heating zone length400mm
Constant temperature zone length200mm
Tube Materialhigh purity quartz tube
Tube diameterO.D80*I.D74*1000mm Quartz Tube
Tube Length1000mm,750mm,1000mm,1200mm as enquiry
ThermcoupleK type
Maximum heating temper1150 dgree
Heating rate20c/min,adjustable suggestion 10 degree/min
Heating elementFe-Co-Al by Mo alloy
Sealing Methodstainless steel vacuum flange
Vacuum Air-tightness9.8×10-4Pa
Temperature Accuracy±1℃
Control ModeIntelligent PID programmable Control,30 steps sintering curve restore
Mass Flow Controller3 gas way mass flow controller
Flowmeter Core304 stainless steel
Measure Accuracy+/- 1.0% F.S
Pressure Range-0.1~0.15MPa
A way gas range0~100SCCM
B way gas range0~200SCCM
C way gas range0~500SCCM
Vacuum Pump4C
Power SupplyAC220V  50Hz
  • Phone:+86 371 5502 7794
  • Fax: +86 371 5502 7786
  • E-mail: chengyi@chysk.com
  • Whatsapp/wechat: +86 156 3927 2359
  • Skype: jennyhao8819
  • Add: #136,10th Avenue,Jingnan 8th Road,Economic Development Zone,Zhengzhou,China