1.Maximum Coating Wafer:8"
2.HDPE inner chamber material
3.PLC programmable control with 7" touch panel
4.Auto dispenser system for option
The AC200-COT-CTM adopts high-precision servo motors with forward and reverse rotation functions HDPE inner cavity, solvent resistant PC transparent cover, corrosion-resistant and easy to clean.
PLC control, 7-inch full-color touch screen operation. Can process fragments to 8-inch circular substrates. Can add back cleaning and edge glue removal functions to meet industrial machine applications. Can add splash proof hood cleaning and development functions to meet customized needs
| AC200-COT-CTM Auto Dispenser Spin coater | |
| Max.Wafer Diameter | 1cm-8” |
| Speed adjustable range | 20~10000rpm,adjustable |
| Acceleration range | 20~50000rpm/s |
| Speed resolution | 1rpm |
| Max single step time | 3000s |
| Time resolution | 0.1s |
| Programmable control | Programmable control,100program 100 steps max |
| Coating uniformity | 4inch :± 0.49%; 6inch: ±0.76%; 8inch±0.92% |
| Vacuum chuck | 10mm, 25mm and 2inch chuck included |
| Working voltage | AC220V, 50Hz |
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