16 Inch Larger Chamber Drawer type UV Ozone Cleaner for Max 400*400mm Sample Size

The large drawer-type UV light cleaning machine is suitable for cleaning medium to large-sized substrates, such as liquid crystal panels, ITO/FTO conductive glass, wafers, OLEDs, LCDs, silicon wafers, ceramics, metal sheets, polymers, silicone rubber, and other surfaces. It can effectively clean organic substances on the surface of the substrates, thereby achieving surface modification

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Application

· Clean silicon wafer, Gallium Arsenide wafer, quartz and ITO glass

· Clean all types of oxide single crystal substrate such sapphire, STO, and LAO.

· Clean gold and Pt surface

· Oxidizing surface of light metallic material

· Activate Polymers and Crosslink Polymers

· UV Strip Photo Resist / Photoresist

· UV Clean Production Line LED displays

Product parameters

Construction Material	Stainless Steel 304
Key Components	Schneider Electric, Omron, etc.
Power Supply	220V
UV Lamp	Power and dimensions customizable based on customer requirements; Lifespan: 8,000 hours
Main Operating Spectrum	185nm + 254nm
Effective Cleaning Area	350 × 350 mm (Customizable with larger sizes such as 400×400 mm, 500×500 mm, 600×600 mm, 650×650 mm, etc.)
Cleaning Timer	0 – 99.99 hours or minutes
Safety Protection	Lamp automatically extinguishes when the cleaning chamber door is opened
Irradiation Height	Customizable
Indicators	UV ON/OFF indicator, abnormal status indicator/alarm
Lamp Preheating	Preheating indicator function to ensure precise cleaning data
Heating (Optional)	Optional external heating platform; Temperature range: ambient ~ 300°C
Exhaust Function	Built-in ozone exhaust system with adjustable speed settings; 125 mm diameter outlet, includes ducting and fasteners