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  • CHY-P10LS 13.56MHz Plasma Cleaner
  • CHY-P10LS 13.56MHz Plasma Cleaner
  • CHY-P10LS 13.56MHz Plasma Cleaner

CHY-P10LS 13.56MHz Plasma Cleaner

1.Vacuum plasma cleaner chamber dimension:220*260*200mm

2.Chamber material:Stainless steel

3.RF power:13.56MHz

4.Automatic Matching

5.Made by Henan Chengyi


Chengyi Vacuum Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.

Our plasma cleaner have two type: 40KHz,20MHz and13.56Mhz, and 2.45GHz RF Power for optional. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.

Product parameters
Model No.CHY-P10LS
Product NameVacuum Plasma Cleaner
DisplayLCD touch controller
Working voltageAC 220V, 50Hz
RF Frequency13.56MHz
RF power0~300 w,adjustable
RF offset< 0.2KHz
Characteristic impedance50Ω, automatic matching
Vacuum degree1-30Pa, equipped with a mechanical pump
Gas speedTwo way Float Flow Gas Control60-160ml/min, adjustable
ControlMCU Auto Control or Mannually adjustable
Inner chamber size

Chamber Dimension 220*260*200mm

Capacity: 10L

Pressure GaugeA simple digital pressure gauge is equipped for reading
Clearing time1~99999 adjustable
Cooling wayForced cooling
Vacuum Pump4L rotary vacuum pump
Gross weight95 kg
  • Phone:+86 371 5502 7790
  • Fax: +86 371 5502 7790
  • E-mail: chengyi@chysk.com
  • Whatsapp/wechat: +86 156 3927 2359
  • Skype: jennyhao8819
  • Add: #136,10th Avenue,Jingnan 8th Road,Economic Development Zone,Zhengzhou,China
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