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  • CHY-250TC Laboratory Desktop Drawer UV Ozone Cleaner with 12*12
  • CHY-250TC Laboratory Desktop Drawer UV Ozone Cleaner with 12*12
  • CHY-250TC Laboratory Desktop Drawer UV Ozone Cleaner with 12*12
  • CHY-250TC Laboratory Desktop Drawer UV Ozone Cleaner with 12*12

CHY-250TC Laboratory Desktop Drawer UV Ozone Cleaner with 12*12" Chamber for Max 400mm Wafer Cleaning

1.Sample stage area is 310 mm x 320 mm ( ~12"x12" )

2.Wave Length: 253.7nm and 184.9nm

3.UV light area: 200 x 200 mm 

4.Power supply :AC220V 50Hz

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Application

· Clean silicon wafer, Gallium Arsenide wafer, quartz  and ITO glass

· Clean all types of oxide single crystal substrate such sapphire, STO, and LAO.

· Clean gold and Pt surface

· Oxidizing surface of light metallic material

· Activate Polymers and Crosslink Polymers

· UV Strip Photo Resist / Photoresist

· UV Clean Production Line LED displays

Product parameters
Input Power· AC 220V, 50/60 Hz, (110VAC available upon request )· Power 250 W Max.
Environment Requirement

· Indoor Use Only; Altitude Use Up To 5,500 Feet;

· Temperature Range 41-104 Degrees Fahrenheit;

· Maximum Relative Humidity 80%, Up To 87 Degrees Fahrenheit Decreasing Linearly 

  to 50% Relative Humidity At 104 Degrees Fahrenheit;

· Main Power Supply Fluctuations Not To Exceed 10% Of The Nominal Voltage; Over voltage Category II;

· Pollution Degree 2; ozone level (ambient) measurement at <45 ppb.

UV Lamp

· Solid metal double wave mercury lamp

 · Wave Length: 253.7nm and 184.9nm 

· UV lamp service life:  5000 hrs

· UV light area: 200 x 200 mm 

· Can clean crystal wafer with diameter up to 12“

Chamber & Sample Stage

· Stainless steel case

· Sliding drawer for easy sample loading

· Sample stage area is 310 mm x 320 mm ( ~12"x12" )

· Ozone venting device is built in the chamber

· Timer ranges from 0.01 seconds to 99.9 hours.

Heatable Sample Stage

·Sample stage is heatable up to 150ºC with precision temperature controlle

· Temperature controller is 20 segments programmable with +/-2 C accuracy

· Temperature uniformity:<10C within 6 inches diameter area; <20C within 12 inches diameter

· Heating rate: 15C max. 

· The distance between sample stage and lamp is adjustable from 20mm  to 40mm.

Vent Port

3 in. diameter vent port is built in the back of the machine· One 10 ft. flexible pipe and one vent

clamp are included for connecting the cleaner exhaust to a lab venting system.

Dimension510mm x 350mm x 400mm (W x H x D)
Net Weight62 lbs
WarrantyOne-year limited warranty with lifetime support. The fragile UV lamp is not included in the warranty.



  • Phone:+86 371 5502 7794
  • Fax: +86 371 5502 7786
  • E-mail: chengyi@chysk.com
  • Whatsapp/wechat: +86 156 3927 2359
  • Skype: jennyhao8819
  • Add: #136,10th Avenue,Jingnan 8th Road,Economic Development Zone,Zhengzhou,China