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  • CHY-P5S 40KHz 5L Vacuum Plasma Cleaner with O.D150*270mm Quartz Chamber
  • CHY-P5S 40KHz 5L Vacuum Plasma Cleaner with O.D150*270mm Quartz Chamber
  • CHY-P5S 40KHz 5L Vacuum Plasma Cleaner with O.D150*270mm Quartz Chamber
  • CHY-P5S 40KHz 5L Vacuum Plasma Cleaner with O.D150*270mm Quartz Chamber

CHY-P5S 40KHz 5L Vacuum Plasma Cleaner with O.D150*270mm Quartz Chamber

1.Chamber dimension:O.D 150*270mm

2.Chamber material:Stainless steel or High Purity Quartz

3.RF power:40KHz

4.Automatic Matching

5.Made by Henan Chengyi

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Application

Chengyi Vacuum Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.

Our plasma cleaner have two type: 40KHz,20MHz and13.56Mhz, and 2.45GHz RF Power for optional. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.


Product parameters
Model No.CHY-P5S
Product NamePlasma Cleaner
DisplayLCD touch controller
Working voltageAC 220V, 50Hz
RF Frequency40KHz,13.56MHz for optional
RF power0~300 w,adjustable
RF offset< 0.2KHz
Characteristic impedance50Ω, automatic matching
Vacuum degree10-1000Pa, equipped with a mechanical pump
Gas speedTwo way Float Flow Gas Control60-600ml/min, adjustable
ControlMCU Auto Control or Mannually adjustable
Inner chamber size

Chamber Dimension Φ 150*270mm

Capacity: 5L

Pressure GaugeA simple digital pressure gauge is equipped for reading
Clearing time1~100mins adjustable
Cooling wayForced cooling
Outer dimension600*500*480mm
Gross weight45 kg
  • Phone:+86 371 5502 7794
  • Fax: +86 371 5502 7786
  • E-mail: chengyi@chysk.com
  • Whatsapp/wechat: +86 156 3927 2359
  • Skype: jennyhao8819
  • Add: #136,10th Avenue,Jingnan 8th Road,Economic Development Zone,Zhengzhou,China