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  • Mini RTP 1200 degree Tube Furnace with Halogen Tube
  • Mini RTP 1200 degree Tube Furnace with Halogen Tube
  • Mini RTP 1200 degree Tube Furnace with Halogen Tube

Mini RTP 1200 degree Tube Furnace with Halogen Tube

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Application

1.Fast Annealing,Post-ion implantation annealing

2.RTO,RTN

3.Silicidation

4.Diffusion

5.Electrode alloying

6.Crystallization and densification


Product parameters
Product NameMini RTP Tube Furnace
ModelMini-RTP
Furnace TypeFast Heating/Cooling Sintering
Display ModelLED Digital Light
Maximum Temperature1100℃
Working Temperature≤1000℃
Heating rate≤20℃/Second
Heating zonesSingle heating zone
Quartz Tube DiameterO.D50*600mm
Inner DiameterI.D 42*600mm
Heating Zone Length 100mm
Max Sample

35*25mm


Mini RTP 1200 degree Tube Furnace with Halogen Tube

Control modeIntelligent PID auto control
Temperature Accuracy±1℃
Temperature curve30 segments programmable
Over heat alarmHave
Overcurrent protectionHave
Thermocouple Failure ProtectionHave
Temperature SensorK-type thermocouple
Heating Element3pieces Infrared tube
Quartz Tube MaterialHigh Purity Quartz
After-sales service12 month warranty, durable maintaince and repair support
Power Supply220V  50HZ
Rated power1.5kw
Overall dimensions610×400×410 (mm )
Packing3-ply wooden case
AccessoriesProtective Glove,Crucible Tong,Crucible,Quartz Tube,Vacuum Flange,User Manual.
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