CHY-P2L 13.56MHz Plasma Cleaner with 2L capacity

1.Chamber dimension:O.D 100*270mm

2.Chamber material:Stainless steel or High Purity Quartz

3.RF power:13.56MHz

4.Plasma cleaning automatic matching

5.Made by Henan Chengyi

Inquire Now None

Application

Chengyi Vacuum Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.

Our plasma cleaner have two type: 40KHz and13.56Mhz, and 2.45GHz RF Power for optional. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.

Product parameters

Model No.	CHY-P2L
Product Name	Plasma Cleaner
Display	LCD touch controller
Working voltage	AC 220V, 50Hz
RF Frequency	13.56MHz
Coupled mode	Condenser coupling, without pollute sample
RF power	300 w
RF offset	< 0.2KHz
Characteristic impedance	50Ω, automatic matching
Vacuum degree	10-100Pa, equipped with a mechanical pump
Gas speed	Two way Float Flow Gas Control10-100ml/min, adjustable
Control	PLC Touch Panel Program control
Inner chamber size	Chamber Dimension Φ 100*270mm Capacity: 2L
Pressure Gauge	A simple digital pressure gauge is equipped for reading
Cooling way	Forced cooling
Outer dimension	440390200mm
Gross weight	45 kg